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气体流量计MKS

气体流量计MKS
MKS 气体流量计是半导体制造、高端镀膜、LED、光伏、离子注入等多个行业的高端产品。MKS INSTRUMENTS 在气体、真空仪器及制程控制应用等方面都是行业领军产品,产品起源于压力测量和控制核心技术...

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MKS 气体流量计是半导体制造、高端镀膜、LED、光伏、离子注入等多个行业的高端产品。MKS INSTRUMENTS 在气体、真空仪器及制程控制应用等方面都是行业领军产品,产品起源于压力测量和控制核心技术,延伸到材料递送、气体成分分析、静电荷控制、产品工艺控制、电源和反应气体发生器及真空技术,其产品广泛地应用于各种半导体生产设备和制造过程中

The MKS Type 1179 is a general purpose mass flow controller designed to measure and
control the flow of gases in a wide variety of applications. Type 1179 Mass-Flo® Controllers
are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow
control to as low as 0.2 sccm. It can also be used as a pressure controller when connected
to a suitable pressure transducer.